# On the noise optimization of resonant MEMS sensors utilizing vibration mode localization

> Research article (Applied Physics Letters, 2018) · cited 39× · AI/ML

**Wikidata**: [openalex:W2801614589](https://www.wikidata.org/wiki/openalex:W2801614589)  
**Source**: https://4ort.xyz/entity/on-the-noise-optimization-of-resonant-mems-sensors-utilizing-vibration-mode-localization
