# On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry

> Research article (Micromachines, 2023) · cited 11× · AI/ML

**Wikidata**: [openalex:W4389624761](https://www.wikidata.org/wiki/openalex:W4389624761)  
**Source**: https://4ort.xyz/entity/on-the-dependency-of-the-electromechanical-response-of-rotary-mems-nems-on-their-embedded-flexure-hinges-geometry
