# On Step-and-Scan Trajectories used in Wafer Scanners in Semiconductor Manufacturing

> Research article (2021 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), 2021) · cited 18× · AI/ML

**Wikidata**: [openalex:W4200204266](https://www.wikidata.org/wiki/openalex:W4200204266)  
**Source**: https://4ort.xyz/entity/on-step-and-scan-trajectories-used-in-wafer-scanners-in-semiconductor-manufacturing