# On performance limitations and property correlations of Al-doped ZnO deposited by radio-frequency sputtering

> Research article (Journal of Physics D Applied Physics, 2016) · cited 26× · AI/ML

**Wikidata**: [openalex:W2475140751](https://www.wikidata.org/wiki/openalex:W2475140751)  
**Source**: https://4ort.xyz/entity/on-performance-limitations-and-property-correlations-of-al-doped-zno-deposited-by-radio-frequency-sputtering