# On-machine measurement of a slow slide servo diamond-machined 3D microstructure with a curved substrate

> Research article (Measurement Science and Technology, 2015) · cited 24× · AI/ML

**Wikidata**: [openalex:W2147448695](https://www.wikidata.org/wiki/openalex:W2147448695)  
**Source**: https://4ort.xyz/entity/on-machine-measurement-of-a-slow-slide-servo-diamond-machined-3d-microstructure-with-a-curved-substrate