# On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration

> Research article (Mechatronics, 2018) · cited 31× · AI/ML

**Wikidata**: [openalex:W2788579585](https://www.wikidata.org/wiki/openalex:W2788579585)  
**Source**: https://4ort.xyz/entity/on-chip-capacitive-sensing-and-tilting-motion-estimation-of-a-micro-stage-for-in-situ-mems-gyroscope-calibration