# On characterization of a generic lithography machine in a multi-directional space

> Research article (Mechanism and Machine Theory, 2022) · cited 18× · AI/ML

**Wikidata**: [openalex:W4205952456](https://www.wikidata.org/wiki/openalex:W4205952456)  
**Source**: https://4ort.xyz/entity/on-characterization-of-a-generic-lithography-machine-in-a-multi-directional-space