# Observer-based temperature control of an LED heated silicon wafer

> Research article (Journal of Process Control, 2018) · cited 12× · AI/ML

**Wikidata**: [openalex:W2892611231](https://www.wikidata.org/wiki/openalex:W2892611231)  
**Source**: https://4ort.xyz/entity/observer-based-temperature-control-of-an-led-heated-silicon-wafer