# Numerical tools for the characterization of microelectromechanical systems by digital holographic microscopy

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2015) · cited 23× · AI/ML

**Wikidata**: [openalex:W2176596043](https://www.wikidata.org/wiki/openalex:W2176596043)  
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