# Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses

> Research article (Nanoscale Advances, 2023) · cited 28× · AI/ML

**Wikidata**: [openalex:W4367331493](https://www.wikidata.org/wiki/openalex:W4367331493)  
**Source**: https://4ort.xyz/entity/novel-hexameric-tin-carboxylate-clusters-as-efficient-negative-tone-euv-photoresists-high-resolution-with-well-defined-p