# Novel EUV resist development for sub-14nm half pitch

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 25× · AI/ML

**Wikidata**: [openalex:W2014532759](https://www.wikidata.org/wiki/openalex:W2014532759)  
**Source**: https://4ort.xyz/entity/novel-euv-resist-development-for-sub-14nm-half-pitch