# Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

> Research article (Sensors, 2017) · cited 16× · AI/ML

**Wikidata**: [openalex:W2613009272](https://www.wikidata.org/wiki/openalex:W2613009272)  
**Source**: https://4ort.xyz/entity/nonlinear-parameter-identification-of-a-resonant-electrostatic-mems-actuator