# Nonlinear dynamics study based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

> Research article (Sensors and Actuators A Physical, 2015) · cited 23× · AI/ML

**Wikidata**: [openalex:W921832623](https://www.wikidata.org/wiki/openalex:W921832623)  
**Source**: https://4ort.xyz/entity/nonlinear-dynamics-study-based-on-uncertainty-analysis-in-electro-thermal-excited-mems-resonant-sensor