# Non-traditional inspection strategy for inline monitoring in excursion scenarios: Defect inspection

> Research article (2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2016) · cited 10× · AI/ML

**Wikidata**: [openalex:W2436944604](https://www.wikidata.org/wiki/openalex:W2436944604)  
**Source**: https://4ort.xyz/entity/non-traditional-inspection-strategy-for-inline-monitoring-in-excursion-scenarios-defect-inspection