# Non-Linear Behavioral Modeling of Capacitive MEMS Microphones

> Research article (2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023) · cited 14× · AI/ML

**Wikidata**: [openalex:W4322731233](https://www.wikidata.org/wiki/openalex:W4322731233)  
**Source**: https://4ort.xyz/entity/non-linear-behavioral-modeling-of-capacitive-mems-microphones
