# New ways of looking at masks with the SHARP EUV microscope

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W1964373519](https://www.wikidata.org/wiki/openalex:W1964373519)  
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