# New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope

> Research article (MRS Communications, 2018) · cited 26× · AI/ML

**Wikidata**: [openalex:W2802656211](https://www.wikidata.org/wiki/openalex:W2802656211)  
**Source**: https://4ort.xyz/entity/new-perspectives-on-nano-engineering-by-secondary-electron-spectroscopy-in-the-helium-ion-and-scanning-electron-microsco