# Nanopositioning control of an electrostatic MEMS actuator: adaptive terminal sliding mode control approach

> Research article (Nonlinear Dynamics, 2021) · cited 15× · AI/ML

**Wikidata**: [openalex:W3175634062](https://www.wikidata.org/wiki/openalex:W3175634062)  
**Source**: https://4ort.xyz/entity/nanopositioning-control-of-an-electrostatic-mems-actuator-adaptive-terminal-sliding-mode-control-approach