# Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry

> Research article (Ultramicroscopy, 2015) · cited 53× · AI/ML

**Wikidata**: [openalex:W2213975049](https://www.wikidata.org/wiki/openalex:W2213975049)  
**Source**: https://4ort.xyz/entity/nanometer-scale-elemental-analysis-in-the-helium-ion-microscope-using-time-of-flight-spectrometry