# Multiscale Modeling and Recurrent Neural Network Based Optimization of a Plasma Etch Process

> Research article (Processes, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3118240984](https://www.wikidata.org/wiki/openalex:W3118240984)  
**Source**: https://4ort.xyz/entity/multiscale-modeling-and-recurrent-neural-network-based-optimization-of-a-plasma-etch-process