# Multiscale modeling and neural network model based control of a plasma etch process

> Research article (Process Safety and Environmental Protection, 2020) · cited 14× · AI/ML

**Wikidata**: [openalex:W3089117586](https://www.wikidata.org/wiki/openalex:W3089117586)  
**Source**: https://4ort.xyz/entity/multiscale-modeling-and-neural-network-model-based-control-of-a-plasma-etch-process