# Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography

> Research article (Procedia Engineering, 2015) · cited 16× · AI/ML

**Wikidata**: [openalex:W2191020063](https://www.wikidata.org/wiki/openalex:W2191020063)  
**Source**: https://4ort.xyz/entity/multiple-patterning-with-process-optimization-method-for-maskless-dmd-based-grayscale-lithography