# Multiple beam inspection (MBI) for 7nm node and beyond: technologies and applications

> Research article (Metrology, Inspection, and Process Control for Microlithography XXXIII, 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2924535968](https://www.wikidata.org/wiki/openalex:W2924535968)  
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