# Multiparameter and Parallel Optimization of ReaxFF Reactive Force Field for Modeling the Atomic Layer Deposition of Copper

> Research article (The Journal of Physical Chemistry C, 2017) · cited 17× · AI/ML

**Wikidata**: [openalex:W2772549958](https://www.wikidata.org/wiki/openalex:W2772549958)  
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