# Multilayer CMP hotspot modeling through deep learning

> Research article (Design-Process-Technology Co-optimization for Manufacturability XIII, 2019) · cited 12× · AI/ML

**Wikidata**: [openalex:W2923996772](https://www.wikidata.org/wiki/openalex:W2923996772)  
**Source**: https://4ort.xyz/entity/multilayer-cmp-hotspot-modeling-through-deep-learning