# Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for Counting Single Micrometer-Sized Airborne Particles on Chip

> Research article (IEEE Journal of Solid-State Circuits, 2016) · cited 77× · AI/ML

**Wikidata**: [openalex:W2539247091](https://www.wikidata.org/wiki/openalex:W2539247091)  
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