# Multibeam mask writer MBM-1000

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2018) · cited 11× · AI/ML

**Wikidata**: [openalex:W3193967158](https://www.wikidata.org/wiki/openalex:W3193967158)  
**Source**: https://4ort.xyz/entity/multibeam-mask-writer-mbm-1000