# Multi-trigger resist: novel synthesis improvements for high resolution EUV lithography

> Research article (Advances in Patterning Materials and Processes XXXVI, 2019) · cited 12× · AI/ML

**Wikidata**: [openalex:W2931899564](https://www.wikidata.org/wiki/openalex:W2931899564)  
**Source**: https://4ort.xyz/entity/multi-trigger-resist-novel-synthesis-improvements-for-high-resolution-euv-lithography