# Multi-spectral snapshot diffraction-based overlay metrology

> Research article (Optics Letters, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4382786377](https://www.wikidata.org/wiki/openalex:W4382786377)  
**Source**: https://4ort.xyz/entity/multi-spectral-snapshot-diffraction-based-overlay-metrology