# Multi-beam Inspection (MBI) development progress and applications

> Research article (Metrology, Inspection, and Process Control for Microlithography XXXIV, 2020) · cited 12× · AI/ML

**Wikidata**: [openalex:W3010836465](https://www.wikidata.org/wiki/openalex:W3010836465)  
**Source**: https://4ort.xyz/entity/multi-beam-inspection-mbi-development-progress-and-applications