# Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination

> Research article (IEEE Transactions on Instrumentation and Measurement, 2024) · cited 40× · AI/ML

**Wikidata**: [openalex:W4399728409](https://www.wikidata.org/wiki/openalex:W4399728409)  
**Source**: https://4ort.xyz/entity/motion-control-of-wafer-scanners-in-lithography-systems-from-setpoint-generation-to-multistage-coordination