# Monolithic CMOS—MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Stabilization and Performance Enhancement

> Research article (Journal of Microelectromechanical Systems, 2015) · cited 35× · AI/ML

**Wikidata**: [openalex:W2174374417](https://www.wikidata.org/wiki/openalex:W2174374417)  
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