# MODELLING AND DECISION SUPPORT SYSTEM FOR INTELLIGENT MANUFACTURING: AN EMPIRICAL STUDY FOR FEEDFORWARD-FEEDBACK LEARNING-BASED RUN-TO-RUN CONTROLLER FOR SEMICONDUCTOR DRY-ETCHING PROCESS

> Research article (International journal of industrial engineering, 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2911676369](https://www.wikidata.org/wiki/openalex:W2911676369)  
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