# Modeling of the removal mechanism of monocrystalline silicon-based on phase change-dislocation theory and its edge chipping damage during micro-grinding

> Research article (Precision Engineering, 2021) · cited 16× · AI/ML

**Wikidata**: [openalex:W3138557428](https://www.wikidata.org/wiki/openalex:W3138557428)  
**Source**: https://4ort.xyz/entity/modeling-of-the-removal-mechanism-of-monocrystalline-silicon-based-on-phase-change-dislocation-theory-and-its-edge-chipp