# Modeling, fabrication, and characterization of SiC concentrically matched differential capacitance output pressure sensors

> Research article (Sensors and Actuators A Physical, 2018) · cited 28× · AI/ML

**Wikidata**: [openalex:W2789697556](https://www.wikidata.org/wiki/openalex:W2789697556)  
**Source**: https://4ort.xyz/entity/modeling-fabrication-and-characterization-of-sic-concentrically-matched-differential-capacitance-output-pressure-sensors
