# Modeling and tracking control of a novel XYθz stage

> Research article (Microsystem Technologies, 2017) · cited 16× · AI/ML

**Wikidata**: [openalex:W2572870824](https://www.wikidata.org/wiki/openalex:W2572870824)  
**Source**: https://4ort.xyz/entity/modeling-and-tracking-control-of-a-novel-xyz-stage