# Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 15× · AI/ML

**Wikidata**: [openalex:W4206816508](https://www.wikidata.org/wiki/openalex:W4206816508)  
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