# Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis

> Research article (Applied Surface Science, 2016) · cited 15× · AI/ML

**Wikidata**: [openalex:W2524877167](https://www.wikidata.org/wiki/openalex:W2524877167)  
**Source**: https://4ort.xyz/entity/model-selection-in-spectroscopic-ellipsometry-data-analysis-combining-an-information-criteria-approach-with-screening-se