# Model Quality Evaluation in Semiconductor Manufacturing Process With EWMA Run-to-Run Control

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2016) · cited 18× · AI/ML

**Wikidata**: [openalex:W2554724315](https://www.wikidata.org/wiki/openalex:W2554724315)  
**Source**: https://4ort.xyz/entity/model-quality-evaluation-in-semiconductor-manufacturing-process-with-ewma-run-to-run-control