# Model-informed deep learning for computational lithography with partially coherent illumination

> Research article (Optics Express, 2020) · cited 28× · AI/ML

**Wikidata**: [openalex:W3111989262](https://www.wikidata.org/wiki/openalex:W3111989262)  
**Source**: https://4ort.xyz/entity/model-informed-deep-learning-for-computational-lithography-with-partially-coherent-illumination