# Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 64× · AI/ML

**Wikidata**: [openalex:W3188352706](https://www.wikidata.org/wiki/openalex:W3188352706)  
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