# Model-driven convolution neural network for inverse lithography

> Research article (Optics Express, 2018) · cited 35× · AI/ML

**Wikidata**: [openalex:W2902576136](https://www.wikidata.org/wiki/openalex:W2902576136)  
**Source**: https://4ort.xyz/entity/model-driven-convolution-neural-network-for-inverse-lithography