# Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 52× · AI/ML

**Wikidata**: [openalex:W4214914131](https://www.wikidata.org/wiki/openalex:W4214914131)  
**Source**: https://4ort.xyz/entity/mixed-type-wafer-defect-recognition-with-multi-scale-information-fusion-transformer