# Mixed stepping/scanning mode control of stick-slip SEM-integrated nano-robotic systems

> Research article (Sensors and Actuators A Physical, 2018) · cited 54× · AI/ML

**Wikidata**: [openalex:W2894327479](https://www.wikidata.org/wiki/openalex:W2894327479)  
**Source**: https://4ort.xyz/entity/mixed-stepping-scanning-mode-control-of-stick-slip-sem-integrated-nano-robotic-systems