# Mitigation of image contrast loss due to mask-side non-telecentricity in an EUV scanner

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2032487517](https://www.wikidata.org/wiki/openalex:W2032487517)  
**Source**: https://4ort.xyz/entity/mitigation-of-image-contrast-loss-due-to-mask-side-non-telecentricity-in-an-euv-scanner