# Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication

> Research article (Scientific Reports, 2022) · cited 25× · AI/ML

**Wikidata**: [openalex:W3212196095](https://www.wikidata.org/wiki/openalex:W3212196095)  
**Source**: https://4ort.xyz/entity/millimeter-scale-focal-length-tuning-with-mems-integrated-meta-optics-employing-high-throughput-fabrication