# Microstructure evolution and grain orientation in ITO targets and their effects on the film characteristics

> Research article (Journal of Materials Science Materials in Electronics, 2018) · cited 11× · AI/ML

**Wikidata**: [openalex:W2857724966](https://www.wikidata.org/wiki/openalex:W2857724966)  
**Source**: https://4ort.xyz/entity/microstructure-evolution-and-grain-orientation-in-ito-targets-and-their-effects-on-the-film-characteristics