# Microstructure design and optimization of high-sensitivity interdigital capacitive humidity sensor based on uncertainty analysis

> Research article (Measurement, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4386987620](https://www.wikidata.org/wiki/openalex:W4386987620)  
**Source**: https://4ort.xyz/entity/microstructure-design-and-optimization-of-high-sensitivity-interdigital-capacitive-humidity-sensor-based-on-uncertainty-