# Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition

> Research article (Surface and Coatings Technology, 2019) · cited 29× · AI/ML

**Wikidata**: [openalex:W2954438528](https://www.wikidata.org/wiki/openalex:W2954438528)  
**Source**: https://4ort.xyz/entity/microstructure-and-young-s-modulus-of-zrn-thin-film-prepared-by-dual-ion-beam-sputtering-deposition