# Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering

> Research article (Journal of Alloys and Compounds, 2016) · cited 62× · AI/ML

**Wikidata**: [openalex:W2468607945](https://www.wikidata.org/wiki/openalex:W2468607945)  
**Source**: https://4ort.xyz/entity/microstructure-and-hydrogen-impermeability-of-titanium-nitride-thin-films-deposited-by-direct-current-reactive-magnetron
